Dissertation in the field of Signal Processing and Acoustics, Jeremias Seppä
The title of thesis is Linear and traceable scales for nanometrology
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This thesis is a treatise on the correction of periodic error in laser interferometry and diffractometry and the application of interferometry and diffractometry for accurate measurements. Capacitive sensors and diffraction angles are used for measurement of periodic error of laser interferometer, and laser diffractometer rotary table angle scale, resulting in corrections that can be used to attain picometre range uncertainties in laser interferometry and diffraction grating calibration.
Opponent: Dr. Brian Eves, National Research Council Canada, Canada
Supervisor: Professor Erkki Ikonen, School of Electrical Engineering, department of Signal Processing and Acoustics